Phase Shift Mask Inspector from Germany
Advanced optical interferometer for inspecting phase shift photomasks used in semiconductor lithography, measuring phase uniformity and defects. Critical for 193nm immersion lithography processes. HTS 9031.41.0060 covers other wafer inspection optical tools.
Duty Rate — Germany → United States
10%
Rate breakdown
9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Import Tips
• Specify phase measurement accuracy (e.g
• 1° phase error detection)
• Document as complete inspection instrument, not photomask handling part
• Include lithography wavelength compatibility for classification support