Critical Dimension SEM Wafer Metrology Tool from Canada
Optical pre-alignment system for scanning electron microscopes measuring critical dimensions on semiconductor device patterns. Provides optical overlay for nanoscale feature inspection. Under HTS 9031.41.0060 as other wafer/device optical inspector.
Duty Rate — Canada → United States
0%
Rate breakdown
9903.05.860%Universal product exemption (U.S. note 52(b))
Import Tips
• Include SEM integration specs but classify as standalone optical instrument
• Avoid machine part description per note (f) to stay in Chapter 90
• Certify for cleanroom Class 1 use to support semiconductor application