Nanophoton STARFYRE Reticle Defect Review Station from Germany
Near-field optical inspection station for high-resolution review of defects identified by automated reticle inspection tools. Provides sub-50nm defect imaging on photomasks for semiconductor production. Classified under HTS 9031.41.0020 for its photomask defect review specialization.
Duty Rate — Germany → United States
0%
Rate breakdown
9903.05.860%Articles provided for in subdivision (b) of U.S. note 52 to this subchapter
Import Tips
• Specify integration with upstream inspection tools to demonstrate production workflow
• Include radiation safety documentation for near-field optical sources
• Customs may require proof that not substitutable for general SEM equipment