KLA-Tencor Teron 640e EUV Reticle Blank Inspector from China
Extreme ultraviolet (EUV) reticle blank inspection system for detecting buried defects in multilayer blanks before patterning. Uses actinic wavelength inspection critical for 7nm and below nodes. Specifically classified in HTS 9031.41.0020 for photomask/reticle inspection in semiconductor device manufacturing.
Duty Rate — China → United States
25%
Rate breakdown
9903.88.0125%Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
9903.05.860%Universal product exemption (U.S. note 52(b))
Import Tips
• Document EUV-specific optical requirements to distinguish from standard DUV inspection tools
• Comply with vacuum system import requirements and provide cleanroom installation plans
• Avoid common pitfall of classifying as general laboratory optics (9013); specify semiconductor end-use