KLA-Tencor Teron 640e EUV Reticle Blank Inspector from Canada
Extreme ultraviolet (EUV) reticle blank inspection system for detecting buried defects in multilayer blanks before patterning. Uses actinic wavelength inspection critical for 7nm and below nodes. Specifically classified in HTS 9031.41.0020 for photomask/reticle inspection in semiconductor device manufacturing.
Duty Rate — Canada → United States
0%
Rate breakdown
9903.05.860%Universal product exemption (U.S. note 52(b))
Import Tips
• Document EUV-specific optical requirements to distinguish from standard DUV inspection tools
• Comply with vacuum system import requirements and provide cleanroom installation plans
• Avoid common pitfall of classifying as general laboratory optics (9013); specify semiconductor end-use