Camtek EagleR 3D Reticle Metrology System from Japan
3D optical metrology tool for measuring reticle surface topography, overlay marks, and critical dimensions on photomasks. Combines white light interferometry with pattern recognition for sub-1nm precision. HTS 9031.41.0020 due to specialized semiconductor reticle inspection function.
Duty Rate — Japan → United States
0%
Rate breakdown
9903.05.860%Articles provided for in subdivision (b) of U.S. note 52 to this subchapter
Import Tips
• Provide metrology uncertainty specifications (typically <1nm) to support classification
• Include software validation certificates for pattern recognition algorithms
• Separate optical head imports from base units if lower duty rates apply to components