Reticles Defect Repair Laser System from Japan
Laser-based repair station that removes chrome defects and deposits material on reticles using femtosecond pulses. Specific to mask and reticle repair qualifying for HTS 8486.40.0010.
Duty Rate — Japan → United States
0%
Rate breakdown
9903.05.860%Articles provided for in subdivision (b) of U.S. note 52 to this subchapter
Import Tips
• Specify laser pulse duration (<400fs) and deposition materials for classification
• Provide repair resolution data (<50nm) and throughput specifications