Mask Alignment Verification System from Canada
Metrology tool measuring overlay accuracy and pattern placement on finished photomasks before litho use. Manufacturing quality control equipment for masks under HTS 8486.40.0010.
Duty Rate — Canada → United States
0%
Rate breakdown
9903.05.860%Articles provided for in subdivision (b) of U.S. note 52 to this subchapter
Import Tips
• Specify measurement uncertainty (<10nm) and automation level for throughput
• Include stage flatness specifications (<0.5μm) critical for mask metrology
• Critical distinction from Chapter 90 testing equipment via manufacturing integration