Vacuum-Compatible Radial Ball Bearing for Semiconductor Crystal Grinders
Radial ball bearing with dry lubricant for vacuum chamber crystal grinders in semiconductor production. Falls under HTS 8482.10.5064 as other radial bearing. Eliminates hydrocarbon outgassing critical for float zone crystal growth.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If parts of vacuum pumps in crystal growth systems
If designed for vacuum pump bearings rather than processing equipment.
If with integrated non-electrical crystal resistivity sensors
Sensor-equipped bearings for boule characterization classify as instruments.
If other bearing parts not exclusively semiconductor-specific
Generic bearing parts without dedicated semiconductor use fall here.
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Import Tips & Compliance
• Provide bake-out test results proving <10^-8 torr partial pressure compatibility
• Specify ID/OD tolerances to ±1µm for spindle alignment in grinders
• Include conflict minerals declaration for tantalum in hybrid bearings
Related Products under HTS 8482.10.50.64
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This high-precision radial ball bearing is designed for use in crystal growers and pullers during semiconductor wafer manufacturing, supporting rotating shafts under ultra-clean conditions. It falls under HTS 8482.10.5064 as a radial ball bearing not specified elsewhere. Its low-friction and contamination-resistant design ensures smooth operation in Czochralski method crystal growth equipment.
Miniature Radial Ball Bearing for Wafer Grinding Machines
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Cleanroom Radial Ball Bearing for Wafer Polishers
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