Pneumatic Butterfly Valve for CMP Slurry Distribution
Butterfly valve pneumatically actuated for chemical mechanical planarization (CMP) slurry distribution in wafer polishers. Falls under HTS 8481.80.9040 as other appliance for semiconductor processing tanks. PTFE-lined for chemical resistance.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If multiport or manifold configuration
Complex flow distribution appliances have separate provisions.
If for semiconductor-specific slurry filtering systems
Integrated in parts of filtering/polishing machinery per Chapter 84.
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Import Tips & Compliance
• Certify wetted materials for CMP slurries (silica, ceria); verify 1000:1 turndown ratio capability; include SEMI S2 safety certification
Related Products under HTS 8481.80.90.40
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