Digital Proportional Control Valve for CVD Chamber Precursor Flow from China
This valve proportionally meters toxic precursor gases into chemical vapor deposition chambers for gallium arsenide wafer processing, responding to mass flow controller signals. HTS 8481.80.9020 classification for proportional signal-operated control valves used in semiconductor device fabrication equipment. Features fail-safe positioning for hazardous gas handling.
Duty Rate — China → United States
39.5%
Rate breakdown
9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0325%Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Import Tips
• DOT hazardous material shipping papers required for precursor-compatible valves
• Leak test certification (<10^-9 sccm He) mandatory for cleanroom acceptance
• Specify digital protocol (DeviceNet) to distinguish from analog proportional valves