Digital Proportional Control Valve for CVD Chamber Precursor Flow from Canada
This valve proportionally meters toxic precursor gases into chemical vapor deposition chambers for gallium arsenide wafer processing, responding to mass flow controller signals. HTS 8481.80.9020 classification for proportional signal-operated control valves used in semiconductor device fabrication equipment. Features fail-safe positioning for hazardous gas handling.
Duty Rate — Canada → United States
12%
Rate breakdown
9903.05.2910%Section 301 (forced labor) — additional 10% ad valorem on products of Canada
Import Tips
• DOT hazardous material shipping papers required for precursor-compatible valves
• Leak test certification (<10^-9 sccm He) mandatory for cleanroom acceptance
• Specify digital protocol (DeviceNet) to distinguish from analog proportional valves