Epi-Ready Wafer Cleaner Air Filtration Module from Japan
Pre-diffusion cleaning station filtration removing particulates before epitaxial growth, ensuring epi-ready wafer surfaces. Classified HTS 8421.39.0115 as air purification for wafer processing apparatus. Bridges prep to front-end fabrication.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• HF vapor compatibility documentation
• Particle count reduction proof