Wafer Cooling Station from China

Automated wafer cooling stations rapidly cool semiconductor wafers post-high-temperature processing using controlled inert gas or liquid nitrogen flows to prevent thermal shock and defects. Essential temperature change equipment in wafer fab. Classifies under HTS 8419.89.95 cooling apparatus.

Duty Rate — China → United States

39.2%

Rate breakdown

9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
9903.88.0225%Except as provided in headings 9903.88.12, 9903.88.17, 9903.88.20, 9903.88.54, 9903.88.59, 9903.88.61, 9903.88.63, 9903.88.66, 9903.88.67, 9903.88.68, 9903.88.69, or 9903.88.70, articles the product of China, as provided for in U.S. note 20(c) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(d)

Import Tips

Specify cooling rates (e.g

100°C/sec) and cleanroom compatibility

Classify separately from vacuum chambers (8419.89.50) if not under vacuum

End-use statement critical for semiconductor exemption consideration