Wafer Cooling Station from Canada
Automated wafer cooling stations rapidly cool semiconductor wafers post-high-temperature processing using controlled inert gas or liquid nitrogen flows to prevent thermal shock and defects. Essential temperature change equipment in wafer fab. Classifies under HTS 8419.89.95 cooling apparatus.
Duty Rate — Canada → United States
14.2%
Rate breakdown
9903.05.2910%Section 301 (forced labor) — additional 10% ad valorem on products of Canada
Import Tips
• Specify cooling rates (e.g
• 100°C/sec) and cleanroom compatibility
• Classify separately from vacuum chambers (8419.89.50) if not under vacuum
• End-use statement critical for semiconductor exemption consideration