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Thermal Oxidation Furnace for Wafers from Canada

Horizontal tube furnace for growing silicon dioxide layers on semiconductor wafers through high-temperature steam or dry oxygen ambient. HTS 8419.89.95.85 for other material wafer processing involving precise temperature change processes.

Duty Rate — Canada → United States

14.2%

Rate breakdown

9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter

Import Tips

• Specify oxidation temperatures (800-1200°C) and ramp rates for gate oxide processes

• Boat/wafer carrier capacity documentation essential

• General tube furnaces classify under 8514.30 without semiconductor specs