Plasma Etch Chamber Cooling Loop from Germany
Closed-loop cooling system for plasma etch reactor chambers, removing heat from RF electrodes and wafer chucks during dielectric etch processes. HTS 8419.89.9540 machinery for semiconductor temperature-controlled material treatment. Handles 500W+ power densities.
Duty Rate — Germany → United States
10%
Rate breakdown
9903.05.3910%Section 301 (forced labor) — European Union member state (col1 rate < 10 percent): MFN < 10% → total duty capped at 10%
Import Tips
• Document etch rate dependency on chuck temperature uniformity
• Specify RF power handling and vacuum chamber integration