Plasma Etch Chamber Cooling Loop from China
Closed-loop cooling system for plasma etch reactor chambers, removing heat from RF electrodes and wafer chucks during dielectric etch processes. HTS 8419.89.9540 machinery for semiconductor temperature-controlled material treatment. Handles 500W+ power densities.
Duty Rate — China → United States
39.2%
Rate breakdown
9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
9903.88.0225%Except as provided in headings 9903.88.12, 9903.88.17, 9903.88.20, 9903.88.54, 9903.88.59, 9903.88.61, 9903.88.63, 9903.88.66, 9903.88.67, 9903.88.68, 9903.88.69, or 9903.88.70, articles the product of China, as provided for in U.S. note 20(c) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(d)
Import Tips
• Document etch rate dependency on chuck temperature uniformity
• Specify RF power handling and vacuum chamber integration