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Photoresist Coat Track Chiller from Japan

Chiller unit for photoresist coating track modules, maintaining developer and rinse temperatures during wafer photolithography preparation. 8419.89.9540 for semiconductor process cooling excluding domestic equipment. Ensures critical dimension control.

Duty Rate — Japan → United States

12.5%

Rate breakdown

9903.05.4912.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of Japan, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 12.5 percent, as provided for in U.S. note 52 to this subchapter

Import Tips

• Include photoresist viscosity-temperature charts and track tool interface

• Prove process material treatment vs general lab cooling