Epitaxial Wafer Cool-Down Dryer from Japan
Cooling/drying station following epitaxial reactor that controls wafer temperature while removing process gases and moisture using chilled nitrogen. Classified under 8419.39.02 for combined cooling/drying in semiconductor epi process.
Duty Rate — Japan → United States
10%
Rate breakdown
9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Import Tips
• Specify epitaxial material compatibility (Si, SiGe, GaN)
• Document gas flow rates and chill water requirements
• Include defect inspection integration specs