Plasma Etch Vacuum Pump for Wafer Processing from Japan
High-vacuum pump part for plasma etching equipment in semiconductor wafer fabrication, supporting the processing of semiconductor materials into devices. Essential for maintaining process vacuum during reactive ion etching of wafer patterns. HTS 8414.90.91 covers such parts used in semiconductor device processing.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• Provide plasma etch chamber specifications showing semiconductor device processing function
• Document compatibility with fluorinated etch gases (SF6, CF4) required for classification
• Avoid general vacuum pump classification by including etch rate and wafer size specifications