Wafer Metrology Vacuum Stage from Japan
Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of Japan, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 12.5 percent, as provided for in U.S. note 52 to this subchapter
Import Tips
• Specify positioning repeatability (<0.5μm) and vacuum uniformity
• Document supported metrology tools (ellipsometry, reflectometry)
• Include particle add-count testing results