Other
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Other, except parts: > Other
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Products classified under HTS 8414.80.90.00
Czochralski Crystal Puller
A specialized vacuum pump-equipped machine used to grow monocrystalline silicon boules from molten semiconductor material via the Czochralski method. It falls under HTS 8414.80.90.00 as an 'other' air or vacuum pump system dedicated to semiconductor manufacturing processes. The integrated vacuum system maintains the controlled environment necessary for crystal purity.
Float Zone Crystal Grower
Vacuum chamber system with RF heating and vacuum pumps for producing high-purity silicon crystals using the float zone technique in semiconductor production. Classified in 8414.80.90.00 due to its primary vacuum pump functionality for maintaining inert atmospheres during crystal growth.
Wafer Slicing Vacuum Saw
Precision diamond wire saw with integrated vacuum pump system for slicing semiconductor boules into thin wafers while maintaining cleanroom-compatible coolant evacuation. HTS 8414.80.90.00 covers the specialized vacuum pump apparatus essential to the slicing process.
Crystal Boule Grinder Vacuum System
Vacuum-assisted grinding machine that shapes semiconductor crystal boules to precise diameters and flats indicating resistivity, with dust extraction pumps. Falls under 8414.80.90.00 for the critical vacuum debris management in semiconductor wafer preparation.
Wafer Lapping Vacuum Polisher
Double-sided lapping machine with vacuum chucks and slurry evacuation pumps for achieving semiconductor wafer flatness tolerances under 1μm. The HTS 8414.80.90.00 classification applies to its specialized vacuum handling systems critical for wafer planarity.
Semiconductor Vacuum Load Lock Pump
High-vacuum turbomolecular pump system for load lock chambers transferring wafers between atmospheric and vacuum environments in semiconductor tools. Classified under 8414.80.90.00 as specialized vacuum pumping for semiconductor manufacturing processes.
Wafer Backgrind Vacuum Station
Vacuum chuck system with integrated pumps for thinning semiconductor wafers from 775μm to <50μm during backgrinding process. HTS 8414.80.90.00 covers the precision vacuum holding critical for thin wafer handling.
RTP Vacuum Pump Module
Vacuum pump package for Rapid Thermal Processing chambers used in semiconductor annealing and dopant activation at 1000+°C. Falls under 8414.80.90.00 for specialized gas evacuation maintaining process vacuum levels.
Ion Implanter Vacuum Pump
Cryopump system designed for ion implanter chambers achieving UHV levels (<10^-9 Torr) for semiconductor dopant implantation. Classified 8414.80.90.00 as specialized vacuum pump for semiconductor device fabrication.
PECVD Vacuum Foreline Pump
Dry roughing pump for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems handling corrosive precursor gases in thin film deposition. HTS 8414.80.90.00 covers semiconductor-specific vacuum pumping with chemical resistance.
Wafer Cleaning Vacuum Dryer
Marangoni vacuum drying station using IPA vapor and vacuum extraction for megasonic cleaned semiconductor wafers achieving <10nm watermarks. Classified under 8414.80.90.00 for the vacuum drying critical to wafer cleanliness.
Epitaxial Vacuum Pump Skid
Integrated pump package (roughing + high vacuum) for MOCVD epitaxial reactors growing compound semiconductor layers (GaAs, InP). HTS 8414.80.90.00 for semiconductor epitaxy vacuum requirements.
Wafer Metrology Vacuum Stage
Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.
SEM Vacuum Pump Package
Ion pump and turbo pump combination for Scanning Electron Microscopes examining semiconductor features to 1nm resolution. Though testing equipment noted for Chapter 90, pump modules import under 8414.80.90.00.