Wafer Metrology Vacuum Stage from Germany
Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.
Duty Rate — Germany → United States
10%
Rate breakdown
9903.05.3910%Except for products described in headings 9903.05.85–9903.05.92 and 9903.05.97, articles the product of a member state of the European Union, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 10 percent, as provided for in U.S. note 52 to this subchapter
Import Tips
• Specify positioning repeatability (<0.5μm) and vacuum uniformity
• Document supported metrology tools (ellipsometry, reflectometry)
• Include particle add-count testing results