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Wafer Metrology Vacuum Stage from Germany

Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.

Duty Rate — Germany → United States

10%

Rate breakdown

9903.05.3910%Except for products described in headings 9903.05.85–9903.05.92 and 9903.05.97, articles the product of a member state of the European Union, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 10 percent, as provided for in U.S. note 52 to this subchapter

Import Tips

• Specify positioning repeatability (<0.5μm) and vacuum uniformity

• Document supported metrology tools (ellipsometry, reflectometry)

• Include particle add-count testing results