Wafer Metrology Vacuum Stage from China
Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.
Duty Rate — China → United States
41.2%
Rate breakdown
9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0325%Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Import Tips
• Specify positioning repeatability (<0.5μm) and vacuum uniformity
• Document supported metrology tools (ellipsometry, reflectometry)
• Include particle add-count testing results