Wafer Metrology Vacuum Stage from Canada
Precision vacuum chuck with non-contact pins for semiconductor wafer thickness, bow/warp metrology maintaining <1μm positioning accuracy. 8414.80.90.00 for metrology vacuum holding systems.
Duty Rate — Canada → United States
13.7%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Specify positioning repeatability (<0.5μm) and vacuum uniformity
• Document supported metrology tools (ellipsometry, reflectometry)
• Include particle add-count testing results