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SEM Vacuum Pump Package from Japan

Ion pump and turbo pump combination for Scanning Electron Microscopes examining semiconductor features to 1nm resolution. Though testing equipment noted for Chapter 90, pump modules import under 8414.80.90.00.

Duty Rate — Japan → United States

12.5%

Rate breakdown

9903.05.4912.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of Japan, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 12.5 percent, as provided for in U.S. note 52 to this subchapter

Import Tips

• Differentiate from complete SEM via pump module documentation

• Specify column vacuum requirements (<10^-6 Torr)

• Include bakeout temperature capabilities