SEM Vacuum Pump Package from Japan
Ion pump and turbo pump combination for Scanning Electron Microscopes examining semiconductor features to 1nm resolution. Though testing equipment noted for Chapter 90, pump modules import under 8414.80.90.00.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• Differentiate from complete SEM via pump module documentation
• Specify column vacuum requirements (<10^-6 Torr)
• Include bakeout temperature capabilities