RTP Vacuum Pump Module from Germany
Vacuum pump package for Rapid Thermal Processing chambers used in semiconductor annealing and dopant activation at 1000+°C. Falls under 8414.80.90.00 for specialized gas evacuation maintaining process vacuum levels.
Duty Rate — Germany → United States
10%
Rate breakdown
9903.05.3910%Section 301 (forced labor) — European Union member state (col1 rate < 10 percent): MFN < 10% → total duty capped at 10%
Import Tips
• Specify temperature compatibility (up to 1200°C) and vacuum levels
• Include ramp rate specifications (50°C/sec minimum)
• Document compatibility with NH3, H2 process gases