Epitaxial Vacuum Pump Skid from Germany
Integrated pump package (roughing + high vacuum) for MOCVD epitaxial reactors growing compound semiconductor layers (GaAs, InP). HTS 8414.80.90.00 for semiconductor epitaxy vacuum requirements.
Duty Rate — Germany → United States
10%
Rate breakdown
9903.05.3910%Section 301 (forced labor) — European Union member state (col1 rate < 10 percent): MFN < 10% → total duty capped at 10%
Import Tips
• Specify precursor compatibility (TMGa, TMAl) and growth pressures
• Document hydride safety system integration
• Include wafer size range (2-8 inch capability)