Mini Portable Vacuum Pump for Semiconductor Wafer Processing
A small, portable vacuum pump used in semiconductor fabrication cleanrooms for wafer handling and chucking, with flow rates under 0.57 m³/min. It meets HTS 8414.80.16.85 as a low-capacity portable vacuum pump tailored for precise gas evacuation in chip manufacturing. Oil-free design prevents contamination in sensitive environments.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If classified as a part of semiconductor manufacturing equipment
Integral pump components for wafer processing machines are often under tap and valve provisions in Chapter 84.
If not portable and for fixed cleanroom installation
Stationary vacuum pumps for industrial semiconductor use fall under dedicated vacuum pump headings.
If for gas analysis in semiconductor quality control
Pumps in physical/chemical analysis instruments for chip testing are in Chapter 90.
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Import Tips & Compliance
• Include cleanroom compatibility certifications (ISO Class 1-5) and flow rate test reports for Customs verification
• Declare as semiconductor-related to leverage potential duty exemptions under tech import programs
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