Lam Research VMAX Rotary Vacuum Pump from Japan
Stationary rotary vacuum pump at 18 kW power output, specialized for evacuating chambers in semiconductor etching and deposition tools. Classified in HTS 8414.80.1665 for its rotary design, stationary installation, and power specs tailored to semiconductor processing environments.
Duty Rate — Japan → United States
10%
Rate breakdown
9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Import Tips
• Provide vacuum level specs (e.g
• <10^-3 Torr) and semiconductor end-use affidavits for preferential treatment
• Label as 'dry rotary' if oil-free to distinguish from lubricated pumps; check for export control under EAR for vacuum tech