Lam Research VMAX Rotary Vacuum Pump from Canada
Stationary rotary vacuum pump at 18 kW power output, specialized for evacuating chambers in semiconductor etching and deposition tools. Classified in HTS 8414.80.1665 for its rotary design, stationary installation, and power specs tailored to semiconductor processing environments.
Duty Rate — Canada → United States
25%
Rate breakdown
9903.82.0925%Except as provided for in headings 9903.82.16, 9903.82.20–9903.82.26 and 9903.85.68, articles of copper and derivative aluminum and steel articles, as provided for in subdivisions (c)(vi)–(viii) and (xi) of U.S. note 16 to this subchapter
9903.05.900%Articles already subject to Section 232 (steel/aluminum/copper + derivatives, autos + parts, wood, medium/heavy vehicles + parts, semiconductors, patented pharma) — U.S. note 52(f)
Import Tips
• Provide vacuum level specs (e.g
• <10^-3 Torr) and semiconductor end-use affidavits for preferential treatment
• Label as 'dry rotary' if oil-free to distinguish from lubricated pumps; check for export control under EAR for vacuum tech