Semiconductor Wafer Polisher Vacuum Pump from Japan
Turbo-molecular vacuum pump for chemical mechanical polishers achieving mirror-finish wafer surfaces within nanometer flatness for fabrication processes. HTS 8414.10.00.00 for vacuum pumps in wafer polishing equipment.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• Submit CMP process compatibility data showing ultimate vacuum <10^-6 Torr
• Declare vibration isolation specs for polisher integration