Semiconductor Wafer Polisher Vacuum Pump from Japan
Turbo-molecular vacuum pump for chemical mechanical polishers achieving mirror-finish wafer surfaces within nanometer flatness for fabrication processes. HTS 8414.10.00.00 for vacuum pumps in wafer polishing equipment.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of Japan, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 12.5 percent, as provided for in U.S. note 52 to this subchapter
Import Tips
• Submit CMP process compatibility data showing ultimate vacuum <10^-6 Torr
• Declare vibration isolation specs for polisher integration