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Semiconductor Wafer Polisher Vacuum Pump from Germany

Turbo-molecular vacuum pump for chemical mechanical polishers achieving mirror-finish wafer surfaces within nanometer flatness for fabrication processes. HTS 8414.10.00.00 for vacuum pumps in wafer polishing equipment.

Duty Rate — Germany → United States

10%

Rate breakdown

9903.05.3910%Except for products described in headings 9903.05.85–9903.05.92 and 9903.05.97, articles the product of a member state of the European Union, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 10 percent, as provided for in U.S. note 52 to this subchapter

Import Tips

• Submit CMP process compatibility data showing ultimate vacuum <10^-6 Torr

• Declare vibration isolation specs for polisher integration