Dry Scroll Vacuum Pump for Wafer Processing from Japan
Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• Certify particle generation rates <10 particles/cm³ for cleanroom validation
• Include base pressure specs (e.g
• 10^-2 Torr) matching wafer fab requirements
• Avoid declaring as HVAC equipment which attracts different rates