Dry Scroll Vacuum Pump for Wafer Processing from China
Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.
Duty Rate — China → United States
40%
Rate breakdown
9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0325%Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Import Tips
• Certify particle generation rates <10 particles/cm³ for cleanroom validation
• Include base pressure specs (e.g
• 10^-2 Torr) matching wafer fab requirements
• Avoid declaring as HVAC equipment which attracts different rates