Dry Scroll Vacuum Pump for Wafer Processing from Canada
Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.
Duty Rate — Canada → United States
12.5%
Rate breakdown
9903.05.2910%Section 301 (forced labor) — additional 10% ad valorem on products of Canada
Import Tips
• Certify particle generation rates <10 particles/cm³ for cleanroom validation
• Include base pressure specs (e.g
• 10^-2 Torr) matching wafer fab requirements
• Avoid declaring as HVAC equipment which attracts different rates