Dry Scroll Vacuum Pump for Wafer Processing from Canada
Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.
Duty Rate — Canada → United States
12.5%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Certify particle generation rates <10 particles/cm³ for cleanroom validation
• Include base pressure specs (e.g
• 10^-2 Torr) matching wafer fab requirements
• Avoid declaring as HVAC equipment which attracts different rates