Epitaxial Reactor Precursor Delivery Pump from China

Metering pump for hydride and metalorganic precursors in MOCVD epitaxial reactors growing compound semiconductor layers on wafers. Ensures layer uniformity. Under HTS 8413.81.00 for semiconductor liquid pumps.

Duty Rate — China → United States

35%

Rate breakdown

9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
9903.88.0125%Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]

Import Tips

Provide bubbler system diagrams showing liquid precursor vaporization role

Document precursor flow precision to ±0.1 sccm for classification support

Specify GaAs/SiC epi applications in end-use statements