Semiconductor Turbine Compressor Stage from Canada
Precision compressor stages for cleanroom gas turbines supplying 99.999% pure nitrogen to wafer processing chambers without particle contamination. Falls under HTS 8411.99.90 as parts of other gas turbines for semiconductor manufacturing environments. Multi-stage compression achieves required pressure without oil contamination.
Duty Rate — Canada → United States
12.4%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Provide particle count certification (<0.1 particles/ft³ at 0.1μm) meeting ISO Class 1 cleanroom standards
• Declare gas purity levels (6N nitrogen) and flow rates matching semiconductor tool requirements
• Include turbine mapping curves showing surge margin for wafer fab process gases