Semiconductor Turbine Compressor Stage
Precision compressor stages for cleanroom gas turbines supplying 99.999% pure nitrogen to wafer processing chambers without particle contamination. Falls under HTS 8411.99.90 as parts of other gas turbines for semiconductor manufacturing environments. Multi-stage compression achieves required pressure without oil contamination.
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More Specific Codes
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for general industrial air compressors
Compressors without semiconductor cleanroom specs classify under 84.14.
If dominant filtering function
Cleanroom turbine filters may classify as filtering/purifying equipment in 84.21.
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Import Tips & Compliance
• Provide particle count certification (<0.1 particles/ft³ at 0.1μm) meeting ISO Class 1 cleanroom standards
• Declare gas purity levels (6N nitrogen) and flow rates matching semiconductor tool requirements
• Include turbine mapping curves showing surge margin for wafer fab process gases
Related Products under HTS 8411.99.90
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Float Zone Crystal Furnace Turbine Drive
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Wafer Crystal Grinder Turbine Assembly
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Semiconductor Wafer Slicing Turbine Spindle
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Silicon Wafer Lapping Turbine Head
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