CVD Quartz Reactor Liner from China
Fused silica quartz liner tube for chemical vapor deposition (CVD) reactors in semiconductor production. Protects furnace chamber from process gases while maintaining optical transparency for monitoring. HTS 7020.00.30.00 applies to its specialized design for wafer diffusion/oxidation.
Duty Rate — China → United States
37.5%
Rate breakdown
9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0325%Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Import Tips
• Certify OH content (<20 ppm) typical for CVD quartz to distinguish from general furnace tubes
• Avoid bulk packaging declarations; specify semiconductor cleanroom compatibility
• Document gas flow specifications to prove reactor tube function vs. generic tubing