JEOL JSX-5000SPG Electron Beam Pattern Generator from China
The JEOL JSX-5000SPG Electron Beam Pattern Generator integrates electron beam metrology with precision reticle and wafer stage positioning systems for photomask manufacturing. It is classified under tariff item 9031.80.00 as an 'other instrument' for measuring or checking semiconductor patterns, distinct from lithography equipment.
Duty Rate — China → Canada
0%
Import Tips
• Classify the system as a measuring instrument for photomask patterns, not as a lithography machine
• Include the stage positioning accuracy specifications in the import documentation
• Verify if the equipment qualifies for duty relief under the Machinery Remission Program