Thermal Mass Gas Flow Meter
Measures low flow rates of gases using heat transfer principles in clean rooms. Classified HTS 9026.80.60.00 for flow meters of gases, not for process control. Used in semiconductor manufacturing.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If with gas analysis function
Instruments also analyzing chemical composition go to 9027.
If integrated with automatic flow regulators
Automatic controllers excluded from 9026 by Chapter notes.
If valve flow controller
Principal function as flow control valve classifies in 8481.
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Import Tips & Compliance
• Document gas compatibility (N2, Air, etc.) to match declared use
• Cleanroom certification (ISO 14644) aids customs clearance
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