Electro-Pneumatic Isolation Valve for Wafer Polishing Effluent from Canada
Isolation valve with electro-pneumatic actuator segments effluent lines from chemical mechanical planarization (CMP) wafer polishers in semiconductor fabs. Classified under HTS 8481.80.9025 for electrically actuated process valves.
Duty Rate — Canada → United States
12%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Chemical resistance certification for CMP slurry chemistries
• Fail-safe position documentation (normally closed/open)
• P&ID integration drawings for system compatibility