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Wafer Thickness Measurement Station from China

Inline station measuring semiconductor wafer thickness uniformity using laser interferometry for process control. Classified under HTS 8473.40.86.00 when integral to wafer preparation equipment of heading 8472. Ensures wafers meet fab dimensional specifications.

Duty Rate — China → United States

37.5%

Rate breakdown

9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0125%Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]

Import Tips

• Document integration with upstream lapping/polishing equipment

• Specify measurement resolution (e.g

• 0.1μm) proving semiconductor application

• Distinguish process control from standalone metrology tools