Wafer Polishing Slurry Gas Purifier Cartridge from Canada
Cartridge part for purifying nitrogen gas used in slurry delivery systems for semiconductor wafer polishers achieving flatness tolerances. HTS 8421.99.0180 applies as purifying apparatus parts for gases in wafer prep equipment (a)(ii)(C). Prevents oxidation during polishing.
Duty Rate — Canada → United States
10%
Rate breakdown
9903.05.2910%Section 301 (forced labor) — additional 10% ad valorem on products of Canada
Import Tips
• Specify gas flow rates and purity levels (ppb oxygen removal) for semiconductor validation
• Link to wafer grinder/polisher equipment in import documentation