Wafer Polishing Slurry Gas Purifier Cartridge from Canada
Cartridge part for purifying nitrogen gas used in slurry delivery systems for semiconductor wafer polishers achieving flatness tolerances. HTS 8421.99.0180 applies as purifying apparatus parts for gases in wafer prep equipment (a)(ii)(C). Prevents oxidation during polishing.
Duty Rate — Canada → United States
60%
Rate breakdown
9903.03.1450%Articles the product of Canada as provided in subdivision (b)(3) of U.S. note 51 to this subchapter
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Specify gas flow rates and purity levels (ppb oxygen removal) for semiconductor validation
• Link to wafer grinder/polisher equipment in import documentation