Plasma Etch Chamber Cooling Coil Assembly from Canada
Refrigerated cooling coil system for plasma etch chambers in semiconductor manufacturing, circulating coolant to maintain chamber walls at optimal temperatures during wafer processing. Prevents thermal damage to delicate semiconductor structures. HTS 8418.99.8060 for semiconductor-specific refrigerating parts.
Duty Rate — Canada → United States
25%
Rate breakdown
9903.82.0925%Except as provided for in headings 9903.82.16, 9903.82.20–9903.82.26 and 9903.85.68, articles of copper and derivative aluminum and steel articles, as provided for in subdivisions (c)(vi)–(viii) and (xi) of U.S. note 16 to this subchapter
9903.05.900%Articles already subject to Section 232 (steel/aluminum/copper + derivatives, autos + parts, wood, medium/heavy vehicles + parts, semiconductors, patented pharma) — U.S. note 52(f)
Import Tips
• Provide process flow diagrams showing integration in etch tools; declare as replacement part for existing equipment
• Pitfall: classifying as heat exchanger under 8419.50