Exceeding 186.5 kW but not exceeding 746 kW
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Other, except parts: > Other compressors > Other: > Other, including reciprocating and rotary: > Exceeding 186.5 kW but not exceeding 746 kW
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Products classified under HTS 8414.80.20.65
Czochralski Crystal Puller Compressor
A high-power rotary compressor integrated into Czochralski crystal pullers for producing monocrystalline silicon boules in semiconductor wafer manufacturing. It maintains vacuum and gas pressure during the crystal growth process from molten silicon. Classified under HTS 8414.80.20.65 due to its power rating between 186.5 kW and 746 kW and role in semiconductor processing equipment.
Float Zone Crystal Grower Vacuum Pump
Reciprocating vacuum pump powering float zone furnaces for growing high-purity silicon crystals used in semiconductor wafers. Operates at 300 kW to achieve ultra-high vacuum during zone refining. Falls under HTS 8414.80.20.65 for its power range and specific use in semiconductor material growth.
Wafer Slicing Saw Gas Compressor
400 kW rotary gas compressor supplying coolant and process gases to diamond wire wafer slicing saws that cut silicon boules into thin wafers. Ensures precise pressure control for minimal kerf loss in semiconductor wafer preparation. HTS 8414.80.20.65 applies to its power capacity and wafer manufacturing role.
Crystal Boule Grinder Air Compressor
250 kW reciprocating compressor powering pneumatic systems in crystal grinders that shape silicon boules to exact wafer diameters and flats indicating resistivity. Critical for preparing semiconductor crystals post-growth. Classified in HTS 8414.80.20.65 for mid-range power semiconductor processing compressors.
Wafer Lapping Polisher Vacuum Compressor
550 kW vacuum compressor for wafer grinders, lappers, and polishers that achieve mirror-flat surfaces on semiconductor wafers within tight tolerances. Enables fabrication-ready wafer flatness critical for device processing. HTS 8414.80.20.65 covers this power-rated equipment per statistical notes.
Gallium Arsenide Wafer Processing Compressor
Rotary compressor rated at 450 kW for gas delivery systems in compound semiconductor (GaAs) wafer processing equipment. Handles corrosive gases during epitaxial growth and wafer prep. Fits HTS 8414.80.20.65 as specified in statistical notes for semiconductor materials beyond silicon.
Semiconductor Vacuum Pump Station 500 kW
Integrated 500 kW vacuum pump station with multiple rotary stages for evacuating chambers in wafer processing tools. Used across crystal growth, wafer slicing, and polishing lines. HTS 8414.80.20.65 classification for power and semiconductor-specific application.
High-Pressure Wafer Coolant Compressor
350 kW compressor delivering high-pressure deionized water and slurry to wafer grinders and polishers during semiconductor surface preparation. Maintains consistent flow for uniform material removal. Covered by HTS 8414.80.20.65 statistical provisions.