Crystal Grinder Coolant Gas Compressor
Reciprocating compressor circulating coolant gas in crystal grinders that shape semiconductor boules to precise wafer diameters. Classified HTS 8414.80.20.55 for ≤186.5 kW reciprocating compressors in semiconductor wafer manufacturing equipment.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If frame or stationary mount exceeding 186.5 kW
Power rating determines specific statistical suffix within compressor category.
If primarily filtering rather than compressing process gases
Gas/smoke filtering apparatus with integral compressors classify by principal function.
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Import Tips & Compliance
• Specify flat grinding tolerances (microns) proving semiconductor boule application
• Provide material safety data for process gases (argon, nitrogen)
• Include motor nameplate photos verifying power <186.5 kW
Related Products under HTS 8414.80.20.55
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