Silicon Wafer Polisher Vacuum Centrifugal Pump from China
High-vacuum centrifugal pump evacuating chemical mechanical polishing (CMP) chambers to prevent contamination during final wafer surface preparation for device fabrication. HTS 8414.80.20.15 covers centrifugal pumps in wafer polishers per statistical wafer preparation provisions.
Duty Rate — China → United States
37.5%
Rate breakdown
9903.05.3112.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of China, as provided for in U.S. note 52 to this subchapter
9903.88.0125%Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Import Tips
• Document CMP slurry chemical resistance; provide ultimate vacuum specs (e.g
• 10^-6 Torr); require semiconductor fab qualification certificates